Immersion Pumps

General Information

WAFAB designed its line of immersion pumps exclusively to meet the rigorous requirements of the semiconductor industry for recirculating, filtered etch modules. WAFAB’s pumps are manufactured to be contamination-free and provide trouble free and efficient operation. The pumps are available in 1/8 HP, 1/3 HP or 1/2 HP and can be constructed of Polypropylene, PVDF and Teflon. Pumps can be either in-tank or remote and also be adapted for portable or stationary applications

Features

  • Custom designed pump motors that provide the most horsepower and torque in a compact size.
  • Polypropylene, PVDF, Teflon®, and FM 4910 approved materials are available for pump bodies.
  • Provide flow rates up to 25 gpm
  • Standard 10-20 mil thick polypropylene motor coating.
  • Standard Viton O-ring seals
  • Custom ball bearings with krytox lubrication.
  • Precision machined pump body
  • Polypropylene-coated stainless steel screws as well as plastic fan and shroud.
  • One-piece impeller
  • Labyrinth style vapor seal with N2 purge
  • Electrical: Standard 115Vac, 60Hz or 220Vac, 50/60Hz.

Benefits

  • Our compact pump motors, available in three sizes provide optimal performance while being smaller in size.
  • Motors are custom built with a 10-20 mil polypropylene coating to protect against acid splashes and fumes.
  • It’s one-piece construction of the shaft sleeve and impeller preventing pinhole leaks and corrosion of motor shaft.
  • Motor bearings have Krytox lubrication that is rated for high temperature and is chemically inert.
  • The bearings also have a Viton shaft lip seal ensuring that no acid fumes penetrate the motor cavity.
  • A labyrinth style vapor seal with N2 purge designed exclusively by WAFAB protects the motor bearing from acid and acid fumes.
  • Designed to function with WAFAB’s Chemkleen™ series of tanks but can be adapted to any application.

immersion pumps

Pump Curves for 1/8HP, 1/3HP, 1/2HP Pumps


Pump characteristics are derived from using water at 20C in a test tank. The flow is measured with a low inertia paddle wheel in calibrated flow sensor housing.

Pump Selection